Desain sensor massa resonator MEMS menggunakan struktur free-free beam
Submitted : 2021-10-01, Published : 2021-11-01.
Abstract
MEMS is an integrated electro-mechanical device which the technology has been applied to various applications, one of which is for the fabrication of microsensors, such accelerometers, microsensors for flow sensing, pressure sensing and mass sensing. In the MEMS implementation, there are several approaches and structures that can be used. This study designed a MEMS resonator mass sensor by the means of a mechanical resonator approach with free-free beam structure and actuated electrostatically. The design is expected to produce a MEMS based mass sensor with a high performance.
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J. W. Gardner, V. K. Varadan, and O. O. Awadelkarim, Microsensors, MEMS, and smart devices. John Wiley & Sons, Inc., 2003.
Y. Development, "MEMS industry: the headwindsfrom COVID-19 and the way forward," ed, 2020.
Z. Zhou, Z. Wang, and L. Lin, Microsystems and nanotechnology. Springer, 2012.
B. E. DeMartini, J. F. Rhoads, M. A. Zielke, K. G. Owen, S. W. Shaw, and K. L. Turner, "A single input-single output coupled microresonator array for the detection and identification of multiple analytes," Applied Physics Letters, vol. 93, no. 5, p. 054102, 2008.
Y. Kessler, S. Krylov, and A. Liberzon, "Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams," Applied Physics Letters, vol. 109, no. 8, p. 083503, 2016.
C. Zhao et al., "A resonant MEMS accelerometer with 56ng bias stability and 98ng/Hz 1/2 noise floor," Journal of Microelectromechanical Systems, vol. 28, no. 3, pp. 324-326, 2019.
N. Li, C. Xing, P. Sun, and Z. Zhu, "Silicon-Glass-Silicon Triple Stacked Structure for Fabrication of MEMS Resonator Accelerometer," in 2019 20th International Conference on Electronic Packaging Technology (ICEPT), 2019: IEEE, pp. 1-4.
H. Zhang et al., "A high-performance mode-localized accelerometer employing a quasi-rigid coupler," IEEE Electron Device Letters, vol. 41, no. 10, pp. 1560-1563, 2020.
L. Xu, S. Wang, Z. Jiang, and X. Wei, "Programmable synchronization enhanced MEMS resonant accelerometer," Microsystems & Nanoengineering, vol. 6, no. 1, pp. 1-10, 2020.
V. Kumar et al., "Bifurcation-based mass sensing using piezoelectrically-actuated microcantilevers," Applied Physics Letters, vol. 98, no. 15, p. 153510, 2011.
J. Mouro, R. Pinto, P. Paoletti, and B. Tiribilli, "Microcantilever: Dynamical response for mass sensing and fluid characterization," Sensors, vol. 21, no. 1, p. 115, 2021.
T. Rabenimanana, V. Walter, N. Kacem, P. L. Moal, and J. Lardiès, "Nonlinear analytical model of two weakly coupled mems cantilevers for mass sensing using electrostatic actuation," in Multidisciplinary Digital Publishing Institute Proceedings, 2018, vol. 2, no. 13, p. 1084.
E. Martínez-Cisneros et al., "Analytical modeling of mechanical behavior for MEMS/NEMS-based single-clamped multilayer resonators with symmetrical complex shapes," Microsystem Technologies, vol. 27, no. 5, pp. 2167-2182, 2021.
L. Li, Y.-p. Zhang, C.-c. Ma, C.-c. Liu, and B. Peng, "Anti-symmetric mode vibration of electrostatically actuated clamped–clamped microbeams for mass sensing," Micromachines, vol. 11, no. 1, p. 12, 2020.
F. Nabki, T. A. Dusatko, and M. N. El-Gamal, "Microelectromechanical resonators for RF applications," in Wireless Technologies: CRC Press, 2017, pp. 589-628.
H. Campanella, Acoustic wave and electromechanical resonators: concept to key applications. Artech House, 2010.
V. K. Khanna, Nanosensors: physical, chemical, and biological. CRC Press, 2019.
T. Zhang, "Electrostatic free-free beam microelectromechanical resonator," 2012.
Z. J. Davis, W. Svendsen, and A. Boisen, "Design, fabrication and testing of a novel MEMS resonator for mass sensing applications," Microelectronic Engineering, vol. 84, no. 5-8, pp. 1601-1605, 2007.
J. Wang, "Theoretical analysis and design of a double-clamped microchannel resonator," Massachusetts Institute of Technology, 2007.
C.-C. Nguyen, "Micromechanical resonators for oscillators and filters," in 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium, 1995, vol. 1: IEEE, pp. 489-499.
K. Wang, A.-C. Wong, and C.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators," Journal of microelectromechanical systems, vol. 9, no. 3, pp. 347-360, 2000.
M. U. Demirci and C.-C. Nguyen, "Higher-mode free-free beam micromechanical resonators," in IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003, 2003: IEEE, pp. 810-818.
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